A hierarchical circuit-level design methodology for microelectromechanical systems
- 1 January 1999
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Circuits and Systems II: Analog and Digital Signal Processing
- Vol. 46 (10) , 1309-1315
- https://doi.org/10.1109/82.799682
Abstract
A circuit-level methodology for hierarchical design and nodal simulation of microelectromechanical systems (MEMS) is presented. A layout-based schematic view is introduced as a geometrically intuitive MEMS representation that is trans- formed into a schematic suitable for behavioral simulation. As examples of the design methodology, suspended-MEMS iner- tial sensors, resonant actuators and filters are designed using a small set of geometrically parameterized plate, beam, gap and anchor elements. Effects of manufacturing variations are evaluated by simply changing parameter values of the ele- ments.Keywords
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