A double-sided capacitive miniaturized accelerometer based on photovoltaic etch-stop technique
- 31 May 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 53 (1-3) , 261-266
- https://doi.org/10.1016/0924-4247(96)01153-3
Abstract
No abstract availableKeywords
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