Plasma‐Polymerized Dry‐Developable Resist for Synchrotron Radiation Lithography

• 1 March 1987
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 134  (3) , 707-711
• https://doi.org/10.1149/1.2100536

Abstract

Keywords

• SYNCHROTRON RADIATION