TiN Coating on Inside of Pipe by Hollow Cathode Discharge Process.

• 1 January 1995
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 38  (3) , 380-383
• https://doi.org/10.3131/jvsj.38.380

Abstract

Keywords

• TIN COATING
• CATHODE DISCHARGE
• HOLLOW CATHODE
• DISCHARGE PROCESS
• PIPE