Densification of amorphous silicon prepared by hydrogen-ion-beam-assisted evaporation

• 9 September 1996
• journal article
• Published by AIP Publishing in Applied Physics Letters
• Vol. 69  (11) , 1582-1584
• https://doi.org/10.1063/1.117037

Abstract

Keywords

• INFRARED SPECTRA
• ION BEAM
• INFRARED
• THERMAL DESORPTION