Wet etching of gold films compatible with high T c superconducting thin films
- 23 September 1991
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 59 (13) , 1632-1634
- https://doi.org/10.1063/1.106253
Abstract
We report a wet etch process for selective patterning or removing gold (Au) layers on top of high Tc YBa2Cu3O7 (YBCO) thin-film structures. As an etchant for Au, an aqueous solution of potassium iodide (KI) and iodide (I) was chosen. This etchant does not degrade YBCO or any commonly used substrate materials (SrTiO3, MgO, zirconia, and NdGaO3). This KI and I solution gives convenient etch rates of 200–300 Å/min and easily stops on the YBCO due to its high selectivity. Using this wet chemical etching process, we have fabricated structures with better than 1 μm resolution. We have found this etchant to be very useful for secondary electron microscopy analysis of high Tc device structures.Keywords
This publication has 10 references indexed in Scilit:
- Wet etch process for patterning insulators suitable for epitaxial high T c superconducting thin film multilevel electronic circuitsApplied Physics Letters, 1991
- Anisotropic proximity coupling in small YBa2Cu3O7-normal-Pb junctionsApplied Physics Letters, 1990
- Low-resistance noble metal contacts to high-temperature superconductorsJournal of Applied Physics, 1990
- Studies of proximity-effect and tunneling in YBCO/metal layered filmsPhysica C: Superconductivity and its Applications, 1989
- Wet chemical etching of high-temperature superconducting Y-Ba-Cu-O films in ethylenediaminetetraacetic acidApplied Physics Letters, 1989
- Gold contacts on superconducting crystals of YBa2Cu3O7 with very low contact resistivityApplied Physics Letters, 1989
- Low-resistivity, YBa2Cu3O7-to-silver electrical contacts by plasma sprayingJournal of Applied Physics, 1989
- High T c superconductor/noble-metal contacts with surface resistivities in the 10−10 Ω cm2 rangeApplied Physics Letters, 1988
- High performance silver ohmic contacts to YBa2Cu3O6+x superconductorsApplied Physics Letters, 1988
- Stability of superconducting YBa2Cu3O7 in the presence of waterApplied Physics Letters, 1987