Modification of polymer surfaces and the fabrication of submicron-scale functionalized structures by deep-ultraviolet and electron-beam lithography
- 1 November 1993
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 11 (6) , 2210-2213
- https://doi.org/10.1116/1.586458
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: