The Versailles Project on Advanced Materials and Standards (VAMAS) project on ion-implanted reference materials for surface analysis: September 1988
- 1 May 1989
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 7 (3) , 1639-1640
- https://doi.org/10.1116/1.576063
Abstract
The unconventional approach followed for the Versailles Project on Advanced Materials and Standards (VAMAS) project on ion-implanted reference materials for surface analytical characterization of semiconductor materials is sketched and its current status is reviewed.Keywords
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