Curved grating fabrication techniques for surface-emitting distributed feedback lasers

• 1 November 1992
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 10  (6) , 2974-2978
• https://doi.org/10.1116/1.585955

Abstract

Keywords

• CURVED GRATING
• EMITTING DISTRIBUTED
• LASERS
• FEEDBACK
• GRATING FABRICATION TECHNIQUES