Fluid micropumps based on rotary magnetic actuators
- 24 August 2005
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
- Micropump manufactured by thermoplastic moldingPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Development of micromachined devices using polyimide-based processesSensors and Actuators A: Physical, 1994
- Integrated flow-regulated silicon micropumpSensors and Actuators A: Physical, 1994
- A new toroidal-meander type integrated inductor with a multilevel meander magnetic coreIEEE Transactions on Magnetics, 1994
- Metallic microstructures fabricated using photosensitive polyimide electroplating moldsJournal of Microelectromechanical Systems, 1993
- A planar variable reluctance magnetic micromotor with fully integrated stator and coilsJournal of Microelectromechanical Systems, 1993
- Integrated fabrication of polysilicon mechanismsIEEE Transactions on Electron Devices, 1988
- Electrodeposition of Magnetic MaterialsJournal of Applied Physics, 1962