Investigation of laser induced diffusion and annealing processes of arsenic-implanted silicon crystals
- 16 June 1977
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 41 (2) , K171-K173
- https://doi.org/10.1002/pssa.2210410261
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Theory of recombination-enhanced defect reactions in semiconductorsPhysical Review B, 1975