Computer simulations of atomic collisions in solids with special emphasis on sputtering
- 1 January 1986
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 18 (1-6) , 321-343
- https://doi.org/10.1016/s0168-583x(86)80055-6
Abstract
No abstract availableThis publication has 100 references indexed in Scilit:
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