New imaging and deflection concept for probe-forming microfabrication systems

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Abstract
A projection lens with an integrated deflection yoke has been developed as part of a probe-forming system for microfabrication. A single yoke is located at the center of the polepiece gap for the purpose of minimizing deflection aberrations through compensation. The concept of a linked imaging trace generates a shaped beam at the target plane. The following performance parameters have been experimentally verified: a resolution of 20 000 lines per field, forming a square spot of 1.25×1.25 μm with an edge slope of 0.25 μm, over a field of 5×5 mm, and a spot current of 0.75 μA, which corresponds to a current density of 50 A/cm2.

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