Measurement of electron energy distribution in a magnetic multipole ion source
- 1 April 1980
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 51 (4) , 1896-1899
- https://doi.org/10.1063/1.327900
Abstract
The electron energy distribution in a magnetic multipole ion source has been measured utilizing a retarding potential energy analyzer. The observed distribution of the primary electrons is spread out from the thermal population to energies 30% above the discharge energy. Implications on the theory of ionization efficiency are discussed.This publication has 10 references indexed in Scilit:
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