Multifunctional probe microscope for facile operation in ultrahigh vacuum
- 5 July 1993
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 63 (1) , 117-119
- https://doi.org/10.1063/1.109732
Abstract
A scanning force/tunneling microscope (SFM/STM) for remote controlled operation in ultrahigh vacuum (UHV) is described. The lateral forces, normal forces, and tunneling currents between probe tip and sample can all be measured simultaneously. The optical beam deflection detector and the sample position can be adjusted by means of three compact inertial stepping motors. An UHV-compatible light emitting diode is introduced as a general alternative to the widely used laser diode in the detector. Images, taken at 5×10−11 mbar on Si(111) with STM and noncontact SFM, and on NaF(001) with contact SFM, are presented.Keywords
This publication has 9 references indexed in Scilit:
- Piezoelectric inertial stepping motor with spherical rotorReview of Scientific Instruments, 1992
- Compact, combined scanning tunneling/force microscopeReview of Scientific Instruments, 1992
- A low-temperature atomic force/scanning tunneling microscope for ultrahigh vacuumJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Frequency modulation detection using high-Q cantilevers for enhanced force microscope sensitivityJournal of Applied Physics, 1991
- Simultaneous measurement of lateral and normal forces with an optical-beam-deflection atomic force microscopeApplied Physics Letters, 1990
- Combined scanning force and friction microscopy of micaNanotechnology, 1990
- Nanomechanics of a Au–Ir contact using a bidirectional atomic force microscopeJournal of Vacuum Science & Technology A, 1990
- Novel optical approach to atomic force microscopyApplied Physics Letters, 1988
- Atomic Force MicroscopePhysical Review Letters, 1986