Discharge treated thin films
- 1 January 1983
- journal article
- other
- Published by Elsevier in Microelectronics Reliability
- Vol. 23 (1) , 185
- https://doi.org/10.1016/0026-2714(83)91389-6
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Discharge treatment technique of breaking alternate fingers of an interdigital transducerReview of Scientific Instruments, 1982
- Bombardment-induced corrosion resistance of aluminumApplied Physics Letters, 1981
- Improved SERMOSFET processSolid-State Electronics, 1980
- R.F. Sputtered Molybdenum FilmsIETE Journal of Research, 1980