Pd-MOS hydrogen and hydrocarbon sensor device
- 1 April 1981
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Electron Device Letters
- Vol. 2 (4) , 82-84
- https://doi.org/10.1109/edl.1981.25349
Abstract
Work function changes in palladium-gate MOS devices are observed directly with a novel circuit. Adsorption and desorption times and sensitivities of devices exposed to partial pressures of hydrogen are presented. Reaction times and sensitivities to methane and butane are also given.Keywords
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