Ion Implantation and Annealing of Oxides
- 1 January 1986
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Formation of amorphous layers in Al2O3 by ion implantationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Ion Implantation and Annealing of Crystalline OxidesMRS Proceedings, 1985
- Surface softening in silicon by ion implantationJournal of Materials Science, 1984
- Ion implantation and thermal annealing of α-Al2O3 single crystalsJournal of Applied Physics, 1983
- Ion Beam Modification of CeramicsMRS Proceedings, 1983
- Criteria for bombardment-induced structural changes in non-metallic solidsRadiation Effects, 1975