Preparation of Ta/Mo Thin Films by RF-DC Coupled-Magnetoron Sputtering.

• 1 January 1994
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 37  (3) , 255-257
• https://doi.org/10.3131/jvsj.37.255

Abstract

Keywords

• THIN FILMS
• MAGNETORON SPUTTERING
• COUPLED MAGNETORON
• TA/MO THIN
• DC COUPLED
• RF DC