Microgrippers created in microstructurable glass

• 12 December 1997
• journal article
• Published by Springer Nature in Microsystem Technologies
• Vol. 4  (1) , 32-34
• https://doi.org/10.1007/s005420050088

Abstract

Keywords

• PIEZOELECTRIC
• DEFLECTION
• MICROGRIPPER
• GRIPPING
• FABRICATED
• MICROMETERS
• REALISE
• MICROSTRUCTURABLE GLASS