Uniformity of amorphous bubble films
- 1 January 1975
- proceedings article
- Published by AIP Publishing in AIP Conference Proceedings
- Vol. 24 (1) , 570-572
- https://doi.org/10.1063/1.30174
Abstract
Uniformity of the magnetic properties of a bubble film is requisite for proper device operation. We have evaluated the spatial uniformity of Gd‐Co‐Mo films which were rf sputtered from 12 and 20 cm dia. arc‐melted targets. Measurements were made of variations in the collapse field (Hcol), the coercive forced field (Hc), the anisotropy field (Hk), the thickness h, as well as the stripwidth (ws). Films with Hcol uniform to ±3% over a 56 mm dia. wafer have been obtained with a 20 cm. dia. target and aspect ratio =10 (AR=target diameter/electrode spacing). Modifications necessary to obtain better uniformity over large dia. wafers will also be discussed.Keywords
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