Characterization of multilayer thin films by laser-induced thermal desorption mass spectrometry

• 15 December 1987
• journal article
• research article
• Published by American Chemical Society (ACS) in Analytical Chemistry
• Vol. 59  (24) , 2924-2927
• https://doi.org/10.1021/ac00151a019

Abstract

Keywords

• MASS SPECTROMETRY
• THIN FILM
• THERMAL DESORPTION