Fabrication of microstructures with extreme structural heights by reaction injection molding

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1 January 1989

journal article
Published by Wiley in Makromolekulare Chemie. Macromolecular Symposia

Vol. 24 (1) , 241-251
https://doi.org/10.1002/masy.19890240125

Abstract

No abstract available

Keywords

This publication has 3 references indexed in Scilit:

Accuracy Limits And Potential Applications Of The LIGA Technique In Integrated Optics
Published by SPIE-Intl Soc Optical Eng ,1987
Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)
Microelectronic Engineering, 1986
Production of separation-nozzle systems for uranium enrichment by a combination of X-ray lithography and galvanoplastics
The Science of Nature, 1982