Optical Y-junctions and S-bends formed by preferentially etched single-mode rib waveguides in InP

16 September 1982

journal article
Published by Institution of Engineering and Technology (IET) in Electronics Letters

Vol. 18 (19) , 850-852
https://doi.org/10.1049/el:19820578

Abstract

Single-mode optical Y-junctions are demonstrated in epitaxial n⁻/n⁺ InP. The rib waveguides with rectangular cross-section have been made using wet chemical etching in an HCI:H₃PO₄ preferential etchant. The minimum measured loss due to the branching point is approximately 1 dB for Y-junctions with a branching angle of 0.9° at the tip.

Keywords

WET CHEMICAL ETCHING
INP
PREFERENTIALLY ETCHED SINGLE-MODE RIB WAVEGUIDES
BRANCHING POINT
HCL:H3PO4
OPTICAL Y-JUNCTIONS
S-BENDS

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