Preparation of Dielectric Thin Films from Photosensitive Sol-Gel Solution
- 1 September 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (9S)
- https://doi.org/10.1143/jjap.33.5268
Abstract
Fine-patterned Ba x Sr1- x TiO3 (BST) thin films were successfully fabricated from a photosensitive sol-gel solution by means of UV irradiation. This solution was prepared from barium acetate, strontium acetate, and titanium isopropoxide. BST gel films on substrates formed from the solution by spin-coating were irradiated with UV rays through a mask pattern and developed with a mixture of ethanol and water. The obtained patterns were a negative of the mask. The films were finally annealed for crystallization. The obtained films had perovskite structure and good properties.Keywords
This publication has 2 references indexed in Scilit:
- Micro-Patterning of PbZrxTi1-xO3 Thin Films Prepared by Photo Sensitive Sol-Gel SolutionJapanese Journal of Applied Physics, 1993
- Ferroelectric MemoriesScience, 1989