Contrast formation in focused ion beam images of polycrystalline aluminum

• 1 November 1995
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 13  (6) , 2580-2583
• https://doi.org/10.1116/1.588027

Abstract

Keywords

• ION BEAM
• SECONDARY ELECTRON
• THIN FILM
• FOCUSED ION BEAM
• ELECTRON BACKSCATTER DIFFRACTION