Beam damage of self-assembled monolayers

• 1 July 1993
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 11  (4) , 2292-2297
• https://doi.org/10.1116/1.578364

Abstract

Keywords

• DAMAGE OF SELF ASSEMBLED MONOLAYERS
• BEAM DAMAGE OF SELF ASSEMBLED