Silicon and Hybrid Micro‐Electronic Sensors

Open Access
Publisher Website
Google Scholar
Abstract
The penetration of micro‐electronics into new markets is seriously hampered by the lack of efficient, low‐cost sensors. It is not surprising therefore to find that these devices are the subject of research in many laboratories. This paper gives a review of the most important sensors which are fabricated in silicon planar or hybrid technology. The review is preceded by some general considerations with respect to measurement systems and signal conversion.

This publication has 0 references indexed in Scilit: