Time Resolved Diagnostics for Kinetic Studies in N2/O2 Pulsed rf Discharges

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Abstract
Time resolved optical diagnostics have been applied to the study of energy transfers in N2/O2 pulsed radio-frequency discharge. N2(A3Σ+u and NO(X2Π) have been measured by Laser Induced Fluorescence, and NO-γ band by Emission Spectroscopy. The analysis in discharge and post discharge as a function of O2 percentage allows to guess the main mechanisms correlating the relaxation of these species in the post-discharge. NO-γ bands in N2/O2 discharge are mainly excited by N2(A) + NO(X) collisions. The decay rates of N2(A) can be accounted for by O, NO and O2 quenching. NO ground state density, measured by LIF, varies with O2 percentages showing a bell shape profile with a broad maximum. Some EEDF measured by Langmuir probe under continuous discharge conditions show that O2 addition, even in few percents, strongly reduces the density of low energy electrons

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