Ultra-thin Silicon Nitride Gate Dielectric For Deep-sub-micron CMOS Devices

Publisher Website

1 January 1997

proceedings article
Published by Institute of Electrical and Electronics Engineers (IEEE)

p. 51-52
https://doi.org/10.1109/vlsit.1997.623690

Abstract

No abstract available

Keywords

This publication has 3 references indexed in Scilit:

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IEEE Electron Device Letters, 1992