Computer analysis of X‐ray spectra (EDS) from thin biological specimens

Abstract
The analysis of energy‐dispersive X‐ray spectra in the low energy region is complicated by the fact that the shape of the background curve is distorted by absorption and the characteristic peaks partially overlap. A computer program (FORTRAN) has been developed, which fits to the measured spectrum an artificially generated one, composed of calculated background and peaks. The parameters defining the artificial spectrum are simultaneously adapted. After four to five iterations of that adaptation, good agreement with the measured spectrum is achieved. This procedure takes about 3 min, using a small computer system.

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