Abstract
Using a rf sputtering method with a single Ca-Ba-Cu-O target (Ca:Ba:Cu=2:2:3), thin films with a thickness of about 1 μm have been deposited on ZrO2 and Si substrates. Diffusion experiments showed that the resistivity can be largely reduced by treating the films in an environment containing O2 and Tl. Treatment experiments at different temperatures further showed that the resistivity was affected by the temperature. By treating at 730 °C for about 1 h, a film on ZrO2 with a transition temperature of about 110 K has been obtained. Zero resistance was achieved at 75 K.

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