Patterning method for silicides based on local oxidation

• 4 December 1995
• journal article
• Published by AIP Publishing in Applied Physics Letters
• Vol. 67  (23) , 3459-3461
• https://doi.org/10.1063/1.115246

Abstract

Keywords

• BURIED LAYERS
• COBALT SILICIDES
• EPITAXIAL LAYERS
• ETCHING
• FABRICATION
• LITHOGRAPHY
• MASKING
• OXIDATION