Versatile apparatus for low-energy and hyperthermal energy ion scattering spectroscopies

Abstract
We have designed and constructed an apparatus that combines hyperthermal energy ion scattering (+ scattered off the Cu(110) surface with the incident ion energy ranging from 56 eV to 4 keV. We also show a comparison between 1 keV K+ and 1 keV Ar+ scattered from the same surface.