Introductory paper: Device fabrication

• 1 January 1966
• conference paper
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• Vol. IX, 30
• https://doi.org/10.1109/isscc.1966.1157697

Abstract

Keywords

• FABRICATION
• FEEDBACK
• INTEGRATED CIRCUIT INTERCONNECTIONS
• COSTS
• SOLID STATE CIRCUITS