Oxygen Plasma Effects on Performance of Pentacene Thin Film Transistor

• 15 July 2003
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 42  (Part 1, No) , 4218-4221
• https://doi.org/10.1143/jjap.42.4218

Abstract

Keywords

• THIN FILM TRANSISTOR
• OXYGEN PLASMA
• PLASMA EFFECTS
• PENTACENE THIN FILM
• EFFECTS ON PERFORMANCE