Two-dimensional fluid model of high density inductively coupled plasma sources

• 1 January 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (1) , 478-485
• https://doi.org/10.1116/1.587102

Abstract

Keywords

• PLASMA SOURCES
• DENSITY INDUCTIVELY
• COUPLED
• TWO DIMENSIONAL FLUID
• DIMENSIONAL FLUID MODEL