Generation and Annihilation of Intrinsic-Related Defect Centers in 4H/6H-SiC

• 1 January 2001
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 353-356, 439-442
• https://doi.org/10.4028/www.scientific.net/msf.353-356.439

Abstract

Keywords

• DLTS
• IMPLANTATION-INDUCED DEFECTS
• INTRINSIC-RELATED DEFECTS