The Determination of HF, HCl, SiF4, and HCF3 in WF6 Gas
- 1 March 1974
- journal article
- research article
- Published by SAGE Publications in Applied Spectroscopy
- Vol. 28 (2) , 139-142
- https://doi.org/10.1366/000370274774332786
Abstract
An infrared absorption method in the 1- to 15-µ range has been developed for determining HF, HCl, HCF3, and SiF4 in WF6, gas. Because of the reactivity and corrosiveness of WF6, a special gas absorption cell and gas-sampling apparatus were designed and built. Calibration curves were generated for a 10-cm cell. Sensitivity values were 100 wppm for HF and HCl, and 10 wppm for HCF3 and SiF4.Keywords
This publication has 2 references indexed in Scilit:
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- Spectra of compressed gases and molecular interactionsProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1960