Emission characteristics of TiN-coated silicon field emitter arrays
- 1 March 1998
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 16 (2) , 871-874
- https://doi.org/10.1116/1.590222
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- TiN barrier layer formation by the two-step rapid thermal conversion processJournal of Vacuum Science & Technology A, 1996
- Field-emitter arrays for vacuum microelectronicsIEEE Transactions on Electron Devices, 1991
- Physical properties of thin-film field emission cathodes with molybdenum conesJournal of Applied Physics, 1976