Determination of the Conversion Factor for Infrared Measurements of Carbon in Silicon
- 1 October 1986
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 133 (10) , 2165-2168
- https://doi.org/10.1149/1.2108362
Abstract
The carbon content of silicon single crystals and polycrystals has been measured by charged particle activation analysis (CPAA) and infrared absorption. We obtained a linear relationship between the absorption coefficient at 605 cm−1 and the carbon content obtained by CPAA. We obtained a conversion factor of for a 100% substitutional carbon.Keywords
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