Observation of “blue haze” on electropolished silicon surfaces
- 1 February 1966
- journal article
- research article
- Published by Elsevier in Solid-State Electronics
- Vol. 9 (2) , 171-172
- https://doi.org/10.1016/0038-1101(66)90087-6
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- The preparation of very flat surfaces of silicon by electropolishingSolid-State Electronics, 1963
- An Electropolishing Technique for Germanium and SiliconJournal of the Electrochemical Society, 1963
- Electropolishing Silicon in Hydrofluoric Acid SolutionsJournal of the Electrochemical Society, 1958