Synthesis of high transition temperature superconducting Y-Ba-Cu-O films by radio-frequency plasma flash evaporation
- 1 January 1990
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 18 (6) , 980-984
- https://doi.org/10.1109/27.61513
Abstract
The authors have successfully developed a novel process for the deposition of multicomponent systems, namely radio-frequency (RF) plasma flash evaporation, in which powder mixtures of constituents are continuously injected into a RF plasma and are coevaporated and codeposited onto a substrate. The Y-Ba-Cu-O films prepared by this method showed excellent superconducting properties without postannealing; a deposition rate above several hundred nm/min was achieved. The film deposited on a MgOKeywords
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