Silicon aggregates produced by laser beam in a silicon carbide surface

• 1 December 1989
• journal article
• Published by Elsevier in Applied Surface Science
• Vol. 43  (1) , 256-259
• https://doi.org/10.1016/0169-4332(89)90221-3

Abstract

Keywords

• SILICON CARBIDE
• SILICON AGGREGATES
• AGGREGATES PRODUCED
• CARBIDE SURFACE
• LASER BEAM