Nitridation of the Sol–Gel‐Derived Titanium Oxide Films by Heating in Ammonia Gas
- 1 September 1990
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 73 (9) , 2750-2752
- https://doi.org/10.1111/j.1151-2916.1990.tb06758.x
Abstract
Dip‐coated sol–gel‐derived TiO2 films on an alumina substrate were converted to nonstoichiometric titanium nitride (TiNx (x≦ 1)) films by heating at approxmately 1000°C in NH3 gas. TiO2 films made from TiO2 sols prepared from Ti(O–i‐C3H7)4 and stabilized by diethanolamine were more easily nitrided than those from sols containing HCl as a deflocculant reagent. This appears to be a result of the more porous structure of the former films.Keywords
This publication has 4 references indexed in Scilit:
- Dip-coating of TiO2 films using a sol derived from Ti(O-i-Pr)4-diethanolamine-H2O-i-PrOH systemJournal of Materials Science, 1988
- Preparation of titanium nitride and titanium carbonitride by the preceramic polymer routeJournal of Materials Science Letters, 1988
- Nitridation of TiO2 fibres prepared by the sol-gel methodJournal of Materials Science, 1987
- Photoelectrochemical Properties of TiO2 Films Prepared by the Sol-Gel MethodJournal of the Ceramic Association, Japan, 1987