Depth profiling of non-conductive oxidic multilayers with plasma-based SNMS in HF-mode
- 1 November 1998
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 332 (1-2) , 215-219
- https://doi.org/10.1016/s0040-6090(98)00990-0
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Thin Film and Depth Profile AnalysisPublished by Springer Nature ,1984