Target thickness measurements with quartz crystal sensors of the third generation
- 1 June 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
- Vol. 236 (3) , 641-645
- https://doi.org/10.1016/0168-9002(85)90973-8
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Factors influencing the accuracy of a quartz-crystal oscillator as a thickness monitor for thin-film depositionIl Nuovo Cimento B (1971-1996), 1968
- Verwendung von Schwingquarzen zur W gung d nner Schichten und zur Mikrow gungThe European Physical Journal A, 1959