Process and device technologies for 1 Gbit dynamic random-access memory cells

• 1 November 1995
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 13  (6) , 2329-2334
• https://doi.org/10.1116/1.588068

Abstract

Keywords

• MEMORY CELLS
• GBIT DYNAMIC
• DEVICE TECHNOLOGIES
• DYNAMIC RANDOM
• ACCESS MEMORY
• RANDOM ACCESS