Direct observation of backscatter electron distributions on surfaces

Abstract
The use of vinyl ferrocene monomer as a contaminating agent for the direct SEM observation of backscatter electron flux from target surfaces is described. The method readily yields a backscatter spatial current distribution as a function of radial distance r from the incident probe beam of the form JB(r) = exp(‐br). A geometric backscatter model is suggested as an alternate to that of Archard and is shown to be in good agreement with experiment and Monte Carlo calculations.
Keywords