Direct observation of backscatter electron distributions on surfaces
- 15 March 1973
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 22 (6) , 279-281
- https://doi.org/10.1063/1.1654638
Abstract
The use of vinyl ferrocene monomer as a contaminating agent for the direct SEM observation of backscatter electron flux from target surfaces is described. The method readily yields a backscatter spatial current distribution as a function of radial distance r from the incident probe beam of the form JB(r) = exp(‐br). A geometric backscatter model is suggested as an alternate to that of Archard and is shown to be in good agreement with experiment and Monte Carlo calculations.Keywords
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