Optical Properties of Aluminum Oxide: Determined from Vacuum Ultraviolet and Electron Energy‐Loss Spectroscopies

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Abstract
The optical properties of alpha‐Al2O3 have been determined by two independent methods, vacuum ultraviolet (VUV) spectroscopy and electron energy‐loss spectroscopy (EELS) over the energy range from 6 to 142 eV. For each experimental method two sets of high‐quality data have been measured and analyzed from alpha‐Al2O3. The evolution of the differences between the data for each experimental method and its associated analytical method indicate the reliability of the results, and the comparison between the methods emphasizes the relative advantages of each. VUV spectroscopy offers a higher energy resolution, resolving sharper features in the spectra, whereas EELS significantly extends the energy range, which has been exploited here to 140 eV but can be extended even further. Good overall consistency is found, but there are pronounced differences in the valence region from 10 to 30 eV, where strong absorptions are present, increasing the relative variability of the analysis. This demonstrates that accuracy estimates of the optical properties are meaningful only when supplied as a function of energy, because both strong intrinsic absorptions and weak experimental signals make accurate determinations difficult. Moreover, variations in the optical properties are observed most easily in the interband transition strength, Jcv, and are less evident when the optical properties are represented as the complex index of refraction. Because the optical properties can change with specimen origin and preparation and because of the details of data acquisition and numerical analysis procedures, assessing the contributions of each of these methods to our accurate knowledge of the optical constants is essential.